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Restrict new AVX512 trsm to AVX512VL, rename files for consistency.

Some of the newly added AVX512 packetmath functions, including the masked add for AVX require __AVX512VL__.

Also renamed headers for consistency with the rest of Eigen:

  • upper-camel case .h
  • non-standard headers are .inc (i.e. require being included in odd places)

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