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Make the INSTALL(DIRECTORY empty) calls work with CMake >= 3.1.0.

Since CMake 3.1.0, ${LOG_DIR}, ${PID_DIR} and ${WORK_DIR} were no longer being created because the regular expression does not match anything and CMake's behavior changed in a way that those directories would not be created before filtering the match list anymore.

Instead, just call INSTALL(DIRECTORY) with an empty source, which works with all CMake versions currently supported.

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