Using MODPROBE_FLAGS in /etc/ethercat.conf fails loading of master kernel module

Hi, I found an unexpected behaviour of version 1.6.7 of EtherCAT Master: When using the MODPROBE_FLAGS in the /etc/ethercat.conf, the loading of modules is failing at systemd startup time. E.g. MODPROBE_FLAGS="run_on_cpu=0x3" leads to a systemd error message modprobe: FATAL: Module run_on_cpu=0x3 not found in directory /lib/modules/5.15.148-rt74-6.8.0-devel+git.8c5c2dcbf6ba.

The cause seems to be in the /sbin/ethercatctl script. Here the variable ${MODPROBE_FLAGS} and the following variable for the kernel modulename (ec_master) are in wrong order after the call of modprobe (${MODPROBE}).

The man page of modprobe says: modprobe [-v] [-V] [-C config-file] [-n] [-i] [-q] [-b] [modulename] [module parameters...]

So as far as I understand, first comes the modulename like ec_master followed by the kernel module parameters like run_on_cpu=0x3.

I tested a quick fix of /sbin/ethercatctl on the EtherCat master which works fine.